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Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment

What is SEMI S23?

SEMI S23 is a semiconductor industry standard that tells you exactly how to describe the electric power requirements and energy conservation (among other things) for a piece of equipment.

This edition was approved for publication by the Global Audits and Subcommittee on May 20, 2005. It is required or strongly recommended for most semiconductor manufacturing tools.

PSL specializes exclusively on the entire energy part of SEMI S23. We will gather the energy consumption on the basis on one wafer cycle during the process.

SEMI S23/E6 requires specialized electric power reports.

SEMI S23/ E6 power consumption reporting standard

Traditionally, equipment manufacturers have simply specified three electric power requirements: the voltage (for example, 208 V three-phase), the frequency (for example, 50/60 Hz), and the current (for example, 200 Amp breaker).

However, this is not enough information to allow a buyer to compare, for example, the energy consumption of two different systems. It also doesn’t tell the buyer how much safety margin is built into the requirement for current – perhaps a piece of equipment only needs 150 Amps, but it has a 200 Amp breaker.

SEMI E6 fixes these problems.

SEMI S23/E6 parameters, graphs

SEMI E6 requires the manufacturer to specify, in a very clear way, the actual watts, volt-amps, peak amps, current THD, and process cycle energy.

It also requires the equipment manufacturer to provide a graph of energy consumption during a typical wafer process. All this data will be used for the SEMI S23 energy consumption report.

One-Click SEMI S23/E6 reporting with the Industrial Power Corruptor

The Industrial Power Corruptor‘s Power Flow Analysis Option is optimized for SEMI S23, and automatically produces the correct graphs and data for the required SEMI E6 Type 400 Report.

Power Standards Lab specializes in preparing SEMI S23/E6 reports at your site, or in our lab, or through our Testing Partner program. Please contact us to get started.

Record the energy consumption during your industrial process – know where your power is going.

Use the drop-down list at the top to see similar graphs for harmonics, power factor, peak current, kVARs, and more.

Optimized for SEMI S23/E6.

Power Standards Lab
980 Atlantic Ave.
Alameda, California 94501

contact@powerstandards.com
TEL: ++1.510.522.4400
US: 1.888.SEMI.F47 or 1.888.736.4347

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